Micro-electro-mechanical systems (MEMS)
Christenson, Todd R. Sandia National Laboratories, Albequerque, New Mexico.
- Microfabrication technology
- Links to Primary Literature
- Additional Readings
Systems that couple micromechanisms with microelectronics. Such systems are also referred to as microsystems, and the coupling of micromechanisms with microelectronics is also termed micromechatronics. Micromechanics refers to the design and fabrication of micromechanisms that predominantly involve mechanical components with submillimeter dimensions and corresponding tolerances of the order of 1 micrometer or less. The types of systems encompassed by MEMS represent the need for transducers that act between signal and information processing functions, on the one hand, and the mechanical world, on the other. This coupling of a number of engineering areas leads to a highly interdisciplinary field that is commensurately impacting nearly all branches of science and technology in fields such as biology and medicine, telecommunications, automotive engineering, and defense. Ultimately, realization of a “smart” MEMS may be desired for certain applications whereby information processing tasks are integrated with transduction tasks, yielding a device that can autonomously sense and accordingly react to the environment. See also: Transducer
The content above is only an excerpt.
for your institution. Subscribe
To learn more about subscribing to AccessScience, or to request a no-risk trial of this award-winning scientific reference for your institution, fill in your information and a member of our Sales Team will contact you as soon as possible.
to your librarian. Recommend
Let your librarian know about the award-winning gateway to the most trustworthy and accurate scientific information.
AccessScience provides the most accurate and trustworthy scientific information available.
Recognized as an award-winning gateway to scientific knowledge, AccessScience is an amazing online resource that contains high-quality reference material written specifically for students. Its dedicated editorial team is led by Sagan Award winner John Rennie. Contributors include more than 9000 highly qualified scientists and 42 Nobel Prize winners.
MORE THAN 8500 articles and Research Reviews covering all major scientific disciplines and encompassing the McGraw-Hill Encyclopedia of Science & Technology and McGraw-Hill Yearbook of Science & Technology
115,000-PLUS definitions from the McGraw-Hill Dictionary of Scientific and Technical Terms
3000 biographies of notable scientific figures
MORE THAN 17,000 downloadable images and animations illustrating key topics
ENGAGING VIDEOS highlighting the life and work of award-winning scientists
SUGGESTIONS FOR FURTHER STUDY and additional readings to guide students to deeper understanding and research
LINKS TO CITABLE LITERATURE help students expand their knowledge using primary sources of information